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Notice ID Number: NIST-SS26-102 Title: Sources Sought Notice for Hydrofluoric Acid Vapor Etcher The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government's anticipated needs. BACKGROUND The Boulder Microfabrication Facility (BMF) is an ISO class 5 cleanroom that micro- and nano- fabricates devices to meet the NIST mission. Part of the required processing is using a Hydrofluoric Acid (HF) vapor etcher to etch films. The BMF currently has an HF vapor etcher that is used to process 100 mm substrates, and the BMF currently requires the ability to process up to 150 mm substrates. Specific requirements for the HF vapor etcher are: Must be made of materials compatible with HF Must meet all industry safety requirements for storing, processing, and maintaining 48 % HF Must be able to perform HF vapor etch as per semiconductor industry standards Must use HF liquid, HF gas is not acceptable Must be compatible for use in an ISO class 5 cleanroom. Must be able to accommodate samples with sizes from chips to 150 mm SEMI spec wafers Must be able to both mechanically clamp and secure substrates with an electrostatic chuck or holder. Must be able to heat samples from ambient to 60 C with appropriate temperature control Must be a tabletop unit that can fit into a standard size chemical fume hood. Prototypes, one-off systems, demonstration models, used instruments, or refurbished instruments will not be considered for award. HOW TO RESPOND TO THIS NOTICE In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, and preferably before the closing date and time of this notice. Please note that to be considered for award under any official solicitation, the entity must be registered and “active” in SAM at the time of solicitation response. Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company's Unique Entity ID (UEI). Identify the equipment that your company sells that can meet the objectives addressed in the BACKGROUND section of this notice. For each product recommended to meet the Government's requirement, provide the following: Manufacturer name Model number Technical specifications If your company is not the manufacturer, provide information on your company's status as an authorized reseller of the product(s) Describe performance capabilities of the product(s) your company recommends to meet the Government's requirements. Additionally, if there are other features or functions that you believe wo…

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