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Title: SUSS ACS200 Control System Upgrade Combined Sources Sought/ Notice of Intent to Sole Source *****THIS IS A COMBINED SOURCES SOUGHT NOTICE AND NOTICE OF INTENT TO SOLE SOURCE***. BACKGROUND The National Institute of Standards and Technology (NIST) Center for Nanoscale Science and Technology (CNST) enables science and industry by providing essential measurement methods, instrumentation, and standards to support all phases of nanotechnology development, from discovery to small production at the Gaithersburg, MD campus. The CNST cleanroom supports numerous NIST and external projects, including the NIST‑on‑a‑chip nanophotonic efforts, that utilize complex processing involving aggressively scaled patterning, etching and deposition and numerous CHIP funded research projects. A high-quality pattern developing and resist coating are essential prerequisites for the precision nanoscale lithography required for micro/nano fabrication. Precision nanoscale lithographic imaging is a critical part of the CNST NanoFab mission. The NanoFab has a need to apply these highly controlled processes repeatedly to every target substrate throughout the entire period of projects and independent from the influence of operators. CNST has a tool which can satisfy all these requirements, and it is the ACS200 Microlithography Cluster. Currently this tool is not operational due to the broken control computer. The existing computer is also too old and Suss no longer offers the same replacement. To work with the newer computer, electronic controller also needs to be upgraded and re-configurated. CNST has a strong need to repair/upgrade this micro-lithography cluster system, an automated (“cassette-to-cassette”) cluster system that has the capability to provide a highly controllable, repeatable, and automated process for spin coating, spray coating, developing and hot plate curing of organic or dielectric films. The reviving of this system is highly demanded by broad user groups. NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above, in addition to the following essential requirements Line Item 0001: Add new Tool Controller Panel and PC with a proper operating system to NIST's existing SUSS ASC200 Gen3 Microlithography cluster that meet or exceed the following technical specifications. Technical Specifications All materials shall be new; rebuilt system components will not be considered. All work must be performed by OEM trained personnel qualified to work on SUSS MicroTec ACS200 Microlithography cluster system. The installation, setup, and acceptance will take place at the NIST CNST NanoFab cleanroom in Gaithersburg, MD. Sequences and Recipes : The new computer and controller system shall be configured to perform programmable sequences and recipes for individual and sequential processes compatible with the current SUSS ACS200 GEN3 Microlithography cluster located in NIST CNST cleanroom. Substrate…

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