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Notice ID Number: NIST-SS26-107 Title: Plasma Cleaner for Transmission Electron Microscope Holders The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government's anticipated needs. BACKGROUND To support of the CHIPS for America Act, the NIST Precision Imaging Facility (PIF) requires a plasma cleaner system to clean hydrocarbons and other contaminants from transmission electron microscopy (TEM) holders and other bulk items/specimens. The plasma cleaner tool is intended to support the scanning electron microscope, focused ion beam, and transmission electron microscope instruments (among others) in the PIF. NIST is seeking information from sources that may be capable of providing a solution that will achieve the objectives described above, in addition to the following essential requirements: TECHNICAL REQUIREMENTS: Line Item 0001: Plasma cleaner to remove hydrocarbons from transmission electron microscope holders and bulk items Quantity: One (1) Technical Specifications: Function The system shall be capable of removing hydrocarbons and other contaminants using a radio frequency plasma using one or more process gases. The system shall have a graphical user interface that allows the user to select processing parameters. The graphical user interface shall control all functions of the system. Capacity The system shall be able to accommodate two transmission electron microscope (TEM) holders that are compatible with a Thermo Fisher Talos F200X TEM and a Thermo Fisher Spectra 300 TEM. The system shall be able to accommodate specimens, parts, or items other than a TEM holder for plasma cleaning. Process Gasses: The system shall be able to accommodate at least three process gasses, including (but not limited to) argon, oxygen, and hydrogen. The system shall include mass flow controllers (or similar) to allow arbitrary combinations of the process gasses. Vacuum System: Any vaccum pumps or vacuum system components shall be oil free. All functions of any vacuum system (start, stop, pump, vent, etc.) shall be fully controllable from the user interface. Line Item 0002: Vacuum pumping station for transmission electron microscope holders Quantity: One (1) Function The system shall be capable of continously vacuum pumping multiple transmission electron microscope specimen holders. Capacity The system shall be able to accommodate at least four transmission electron microscope (TEM) holders that are compatible with a Thermo Fisher Talos F200X TEM and a Thermo Fisher Spectra 300 TEM. Vacuum System: If a vacuum system is included, it shall include a turbo pump. All vacuum system components shall be oil free. Plasma Cleaner Connection The pumping station shall be operated separately from the plasma cleaner. The two tools may share utilites (process gasses, vacuum system(s)) but they must be fully independent systems. HOW TO RESPOND TO THIS NOTICE In responding to this …

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