Description

*****THIS IS A COMBINED SOURCES SOUGHT NOTICE AND NOTICE OF INTENT TO SOLE SOURCE***. BACKGROUND The National Institute of Standards and Technology (NIST), Applied Physics Division, Spin Electronics group require a suite of a high-specification nanopositioners and hexapods. The semiconductor supply chain is global, specialized, and interconnected. Chipmakers do business with thousands of individual suppliers that provide the highly complex materials and tools used to produce semiconductors. To address the lack of full visibility into the semiconductors markets supply chain and R&D ecosystem gaps NIST will conduct the measurement science, or metrology, critical to the development of new materials, packaging, and production methods in chip manufacturing. As part of this effort, NIST has a program to develop new methods to non-destructively measure and characterize the structure of complex nanoscopic devices. This approach is based on applying an extreme ultraviolet (EUV) high-harmonic generation (HHG) light source to combine reflectometry with spatial imaging and atomic core level spectroscopy. This effort requires precise nanoscopic positioning of both the EUV optics and the sample position and orientation with strict operation under high vacuum conditions. This can only be accomplished with piezo-nanopositioners specifically designed for operation in high-vacuum conditions. Furthermore, due to the presence of magnetic fields in a section of the system, one hexapod-like system and one 4 axis assembly must be comprised of non-magnetic materials and whose performance cannot be compromised when operated in magnetic fields as high as 1 Tesla. Furthermore, we must maintain compatibility (software and hardware) and seamless interchangeability with existing SmarAct nanopositioners already in use in the beamline at NIST. The goal of this contract is to supply multiple high-vacuum compatible piezo controlled nanopositioning stages along with all necessary controllers. This includes a rotation stage, two separate 4-axes (XYZR) nanopositioners, two hexapod-like positioners, one optical tip/tilt mount and all necessary controllers, cables and peripherals. All positioners must have optical encoders with a resolution of at least 1 nm or 3 micro-degrees and a repeatability better than 50 nm. These are to be used to position the sample and multiple EUV optics along the beamline and end station – all of which occurs in a high-vacuum environment. NIST conducted market research from June 2025 – January 2026 by, speaking with colleagues, performing internet searches, and speaking with vendors to determine what sources could meet NIST's minimum requirements. The results of that market research revealed that only SmarAct Inc (UEI: LFAVHCE9K2X3) can meet all the Governments minimum requirements. HOW TO RESPOND TO THIS NOTICE In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in eit…

Classification

Place of Performance

Contracting Office

Contacts