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Notice ID Number: NIST-SS26-105 Title: Sources Sought Notice for Rapid Thermal Annealing System The purpose of this sources sought notice is to conduct market research and identify potential sources of commercial products/services that satisfy the Government's anticipated needs. BACKGROUND The Boulder Microfabrication Facility (BMF) is an ISO class 5 cleanroom that micro- and nano- fabricates devices to meet the NIST mission. Part of the required processing includes rapidly annealing films. This is achieved though using a Rapid Thermal Annealing (RTA) system. The BMF currently has an RTA system used to process 76.2 mm substrates, and the BMF currently requires the ability to process up to 150 mm substrates. The minimum specifications for the RTA system are: Must be able to perform RTA according to semiconductor industry standards. Must meet all applicable safety and cleanliness standards for use in an ISO class 5 cleanroom. Must be able to reach temperatures of room temperature to 1200 °C with a temperature stability of +/- 1 °C Must have a ramp rate of at least 100 °C/s Must be able to anneal substrates in a vacuum and in gas environments. Must be able to deliver at least 4 gasses including but not limited to 5 % H2 in Ar, Ar, Pure dry air (80 % N2 / 20 % O2), and nitrogen with digital mass flow controllers. Must be able to fit in a 1 m x 1 m x 2 m (W X D X H) floor space. Must be able to process substrates from chips to 150 mm SEMI spec wafers. Must be able to load samples with a clamshell or tray loading system with a preference for a clamshell system. Prototypes, one-off systems, demonstration models, used instruments, or refurbished instruments will not be considered for award. HOW TO RESPOND TO THIS NOTICE In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as possible, and preferably before the closing date and time of this notice. Please note that to be considered for award under any official solicitation, the entity must be registered and “active” in SAM at the time of solicitation response. Provide the complete name of your company, address, name of contact for follow-up questions, their email, their phone number and, if your company has an active registration in https://sam.gov, your company's Unique Entity ID (UEI). Identify the equipment that your company sells that can meet the objectives addressed in the BACKGROUND section of this notice. For each product recommended to meet the Government's requirement, provide the following: Manufacturer name Model number Technical specifications If your company is not the manufacturer, provide information on your company's status as an authorized reseller of the product(s) …

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