Ultra-High Vacuum (UHV) Translation Stagesview on SAM.gov

Background The National Institute of Standards and Technology (NIST) is embarking on a project to support the Extreme Ultraviolet Lithography (EUVL) community by developing characterization of EUV scintillator materials. Many techniques for measuring spatial distribution (or image) of EUV rely on scintillators or devices that convert EUV radiation into visible light. Scintillators tend to be robust and afford the user the ability to use less costly and easier to characterize, visible light detection or imaging systems. However, their characterization requires specialized techniques and hardware which NIST must develop in order to provide accurate characterization of the performance of EUV scintillators. This requirement supports the “Optical Metrology for EUV Generation” Project under Grand Challenge 2, “Advanced Metrology for Future Microelectronics Manufacturing,” for CHIPS R&D Metrology. This requirement enables NIST to construct an ultra-high vacuum microscope to operate in NIST Synchrotron Ultraviolet Research Facility (SURF III) EUV reflectometer beamline. The microscope will allow for the measurement of EUV scintillator efficiency, output spectrum and point spread function. Minimum Capabilities that NIST Requires and for Which Information is Being Requested DRAFT MINIMUM REQUIREMENTS Description: UHV translation stages Quantity: 10 Technical Specifications Ultra-high vacuum compatible: low-outgassing materials, pressure range 10-8 Torr or better: Polyimide or PTFE insulated wire cables with braided, silver-plated copper shielding. All Stainless steel (18-8 or similar) hardware and plain finish materials (no anodization or paint). Stainless steel bearings lubricated with UHV-compatible lubricants (10-9 Torr or better rated at room temperature, no silicone-based lubricants) Vented holes or vented hardware used in unvented blind holes. Minimum bake out temperature 100&deg;C. Travel Range: 50 mm minimum, 55 mm maximum Crossed roller bearing travel with piezo-electric actuator Compact size: < 20 mm thick, 85 mm long, 50 mm wide Closed loop operation: encoder resolution < 10 &micro;m In vacuum cable length: 2 m (minimum) Vacuum interface cabling must use 15-pin D-sub connection and include connectors (PEEK material on vacuum side) Load capacity: 1 kg or more Stages must be cleaned for UHV compatibility, packaged and sealed to maintain cleanliness and be ready for 10-8 Torr base pressure operation with minimal cleaning (alcohol wipe). Description: Motion controller/amplifier Quantity: 10 Technical Specifications 2 units (5 axes each) to control all combined stages in line item 1 Include power supply for each unit: Electrical Requirements: Input Voltage: 120 VAC&plusmn;10% (108--132 VAC) Frequency: 60 Hz&plusmn;3 Hz Power Cord: Detachable 6+ ft line cord, IEC C13 to NEMA 5-15P plug Compliance: UL 62368-1 (or relevant IEEE/ANSI standard), FCC Part 15 Class A/B Controller to motor connector cable length: 2 m minimum Ethernet communication LabView…