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NIST-SS26-CHIPS-167 Title: Sources Sought Notice for vacuum compatible reflective microscope objective and optomechanical hardware BACKGROUND The National Institute of Standards and Technology (NIST) is embarking on a project to support the EUV lithography (EUVL) community by developing characterization of EUV scintillator materials. Many techniques for measuring spatial distribution (or image) of EUV rely on scintillators or devices that convert EUV radiation into visible light. Scintillators tend to be robust and afford the user the ability to use less costly and easier to characterize, visible light detection or imaging systems. However, their characterization requires specialized techniques and hardware which NIST must develop in order to provide accurate characterization of the performance of EUV scintillators. This procurement is for vacuum compatible reflective microscope objectives and optomechanical components for an optical microscope assembly for measuring the visible light output of scintillator samples. The National Institute of Standards and Technology (NIST) has a requirement for a vacuum compatible reflective microscope objectives and optomechanical components for an optical microscope assembly for measuring the visible light output of scintillator samples and is seeking information from sources that may be capable of providing a solution that will achieve the specifications described below: Line Item 0001: Description: vacuum compatible reflective microscope objective Quantity: 4 Technical Specifications Reflective objective: wavelength range 350 nm to 800 nm (UV enhanced aluminum coating) Vacuum compatible: 10-6 Torr or better, 10-8 Torr preferred. No exposed brass, bronze or anodization. Numerical aperture: 0.3 Working distance: 23.8 mm (nominal) Focal length: 13.3 mm Infinity corrected Zemax optical ray trace model must be available to end users. Full access to model. Black box type model is not accepted. Thorlabs part number listed in description. Functional equivalents accepted. Line Item 0002: Description: Vacuum compatible optomechanical hardware Technical Specifications Vacuum compatible: 10-6 Torr or better, 10-8 Torr preferred. No exposed brass, bronze or anodization. Low vapor pressure grease (10-12 Torr or better at 20 C°) if required. Chemically Cleaned and bagged for vacuum service. End-user will bake prior to installation. Thorlabs part numbers and descriptions listed in attachment. Functional equivalents accepted. Line Item 0003: Description: Specialized tools and fasteners Technical Specifications . List HOW TO RESPOND TO THIS NOTICE In responding to this notice, please DO NOT PROVIDE PROPRIETARY INFORMATION. Please include only the following information, readable in either Microsoft Word 365, Microsoft Excel 365, or .pdf format, in the response: Submit the response by email to the Primary Point of Contact and, if specified, to the Secondary Point of Contact listed in this notice as soon as po…
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