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Reactive ion etching (RIE) tool | ENERGY, DEPARTMENT OF | FedOps

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Reactive ion etching (RIE) toolview on SAM.gov

ENERGY, DEPARTMENT OF › ARGONNE NATL LAB - DOE CONTRACTOR

Posted Jun 17, 2026

Due Jun 24, 2026

NAICS 54171 – Research and Development in the Physical, Engineering, and Life Sciences

Sol # 6-MO34-Q-00321-00

Description

Reactive ion etching (RIE) tool

Classification

NAICS54171

PSC Code6640

Contracting Office

OfficeARGONNE NATL LAB - DOE CONTRACTOR

CityLemont

StateIL

ZIP60439

Contacts

Michael Oprondek

moprondek@anl.gov

6302527069

Attachments (1)

Attachment 1

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